HBO Mercury Short Arc for Microlithography
Mercury short arc lamps (also referred to by their abbreviation HBO lamps) with a power consumption of more than 200 W are used almost exclusively in microlithography for the production of electronic semiconductors,
LCD (Liquid Crystal Displays) and PCB (Printed Circuit Boards). Depending on the respective production, various types of equipment (stepper, scanner, mask aligner, etc.) are used, whereby the common feature is that they are all used for exposure.